Characterization of DLC:Si films by the gas effusion technique

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 658-662

  Camargo Jr , S S ^a   Santos, R A ^a   Beyer, W ^b  

^a FEDERAL UNIVERSITY OF RIO DE JANEIRO   (Brazil)

^b FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; GRAPHITIZATION; HYDROCARBONS; HYDROGEN; METHANE; POROUS MATERIALS; SILICON;

DIAMOND-LIKE CARBON (DLC) FILMS; GAS EFFUSION;

AMORPHOUS FILMS;

EID: 0033738706     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00268-X     Document Type: Article

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