Fabrication of metallic nanostructures by atomic force microscopy nanomachining and lift-off process

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 2768-2771

  Hsu, Ju Hung ^a   Lin, Chun Yu ^a   Lin, Heh Nan ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELECTRON BEAM LITHOGRAPHY; ETCHING; FABRICATION; OXIDATION; POISSON RATIO; POLYMETHYL METHACRYLATES; SUBSTRATES;

ELECTROCHEMICAL DEPOSITION; METALLIC NANOSTRUCTURES; NANOELECTRODES; SCANNING PROBE LITHOGRAPHY;

NANOSTRUCTURED MATERIALS;

EID: 13244297138     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1815314     Document Type: Article

References (17)

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