Wave stimulated phenomena in inductively coupled magnetized plasmas

Plasma Physics and Controlled Fusion

Volumn 47, Issue 5 A, 2005, Pages

  Shamrai, K P ^a   Shinohara, S ^b   Virko, V F ^a   Slobodyan, V M ^a   Virko, Yu V ^a   Kirichenko, G S ^a  

^a INSTITUTE FOR NUCLEAR RESEARCH   (Ukraine)

^b KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; HELICONS; MAGNETIZATION; PERMANENT MAGNETS; PLASMA TURBULENCE; WAVE EFFECTS;

HELICON PLASMA (HP); LOW FREQUENCY TURBULENCE; MAGNETIZED INDUCTIVELY COUPLED PLASMA (MICP); PARTICLE CONFINEMENT;

INDUCTIVELY COUPLED PLASMA;

EID: 33748854594     PISSN: 07413335     EISSN: 13616587     Source Type: Journal    
DOI: 10.1088/0741-3335/47/5A/022     Document Type: Conference Paper

References (36)

1. Boswell R W and Chen F F 1997 IEEE Trans. Plasma Sci. 25 1229
2. Chen F F and Boswell R W 1997 IEEE Trans. Plasma Sci. 25 1245
3. Stevens J E, Sowa M J and Cecchi J L 1995 J. Vac. Sci. Technol. A 13 2476
4. Shinohara S, Takechi S and Kawai Y 1996 Japan. J. Appl. Phys. 35 4503
5. Godyak V A and Alexandrovich B M 2004 Phys. Plasmas 11 3553
6. Tynan G R et al 1997 J. Vac. Sci. Technol. A 15 2885
7. Lee H J, Yang I D and Whang K W 1996 Plasma Sources Sci. Technol. 5 383
8. Chang Díaz F R 1999 Trans. Fusion Technol. 35 87
9. Miller R L et al 2001 Bull. Am. Phys. Soc. 46 132
10. Scime E E et al 1998 Plasma Sources Sci. Technol. 7 186
11. Shamrai K P et al 1997 J. Physique Coll. IV 7 C4-365
12. Hong I S et al 2000 Rev. Sci. Instrum. 71 1385
13. Sasaki K, Kokubu H, Hayashi D and Kadota K 2001 Thin Solid Films 386 243
14. Miroshnichenko V I et al 2003 Nucl. Instrum. Methods B 201 630
15. Light M and Chen F F 1995 Phys. Plasmas 2 1084
16. Shinohara S, Miyauchi Y and Kawai Y 1995 Plasma Phys. Control. Fusion 37 1015
17. Krämer M 1999 Phys. Plasmas 6 1052
18. Chevalier G and Chen F F 1993 J. Vac. Sci. Technol. A 11 1165
19. Braginskii O V, Vasil'eva A N and Kovalev A S 2001 Plasma Phys. Rep. 27 699
20. Virko V F, Shamrai K P, Kirichenko G S and Virko Yu V 2004 Phys. Plasmas 11 3888
21. Godyak V 2003 Plasma Phys. Control. Fusion 45 A399
22. Stenzel R L 1991 Phys. Fluids B 3 2568
23. Porkolab M, Arunasalam V and Ellis R A 1972 Phys. Rev. Lett. 29 1438
24. Boswell R W and Giles M J 1976 Phys. Rev. Lett. 36 1142
25. Kaganskaya N M, Krämer M and Selenin V L 2001 Phys. Plasmas 8 4694
26. Kline J L et al 2002 Phys. Rev. Lett. 88 195002
27. Kline J L and Scime E E 2003 Phys. Plasmas 10 135
28. Virko V F, Kirichenko G S and Shamrai K P 2003 Plasma Sources Sci. Technol. 12 217
29. Corr C S et al 2004 Phys. Plasmas 11 4596
30. Boswell R W et al Phys. Plasmas 11 5125
31. Akhiezer A I, Mikhailenko V S and Stepanov K N 1998 Phys. Lett. A 245 117
32. Mikhailenko V S, Stepanov K N and Scime E E 2003 Phys. Plasmas 10 2247
33. Light M, Chen F F and Colestock P L 2001 Phys. Plasmas 8 4675
34. Brown R D, Gilland J H, Hershkowitz N and Breun R A 1995 J. Vac. Sci. Technol. A 13 865
35. Lho T et al 1998 Phys. Plasmas 5 3135
36. Virko V F, Kirichenko G S and Shamrai K P 2002 Plasma Sources Sci. Technol. 11 10