Azimuthally symmetric pseudosurface and helicon wave propagation in an inductively coupled plasma at low magnetic field

Physics of Plasmas

Volumn 5, Issue 9, 1998, Pages 3135-3142

  Lho, T ^a   Hershkowitz, N ^a   Miller, J ^a,b   Steer, W ^a   Kim, G H ^c  

^a University of Wisconsin Madison   (United States)

^b TwinStar Semiconductor LLC   (United States)

^c Hanyang University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EIGENVALUES AND EIGENFUNCTIONS; GLOW DISCHARGES; LEAST SQUARES APPROXIMATIONS; MAGNETIC FIELD EFFECTS; MAXWELL EQUATIONS; NUMERICAL METHODS; PLASMA DENSITY; PLASMA HEATING; PLASMA WAVES; SURFACE WAVES; WAVE PROPAGATION;

HELICON WAVES; INDUCTIVELY COUPLED PLASMA; PLASMA MODE TRANSITION; PSEUDOSURFACE WAVES;

PLASMA SOURCES;

EID: 0032159684     PISSN: 1070664X     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.873040     Document Type: Article

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