Laser-induced etching of tungsten

Applied Surface Science

Volumn 109-110, Issue , 1997, Pages 184-188

  Piglmayer, K ^a   Schieche, H ^a  

^a JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; GAS LASERS; INTERFACES (MATERIALS); LASER APPLICATIONS; LASER BEAM EFFECTS; QUARTZ; THERMAL EFFECTS; TUNGSTEN;

LASER INDUCED THERMAL ETCHING;

ETCHING;

EID: 0031074970     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(96)00657-5     Document Type: Article

References (10)

1. D. Bäuerle, Laser Processing and Chemistry, 2nd ed. (Springer, Berlin, 1996).
2. A.W. Johnson, D.J. Ehrlich and H.R. Sehiossberg, Eds., Laser Controlled Chemical Processing of Surfaces (North-Holland, Amsterdam, 1984).
3. I.W. Boyd, Laser Processing of Thin Films and Microstructures (Springer, Berlin, 1987).
4. D.J. Ehrlich and J.Y. Tsao, Eds., Laser Microfabrication -Thin Film Processes and Lithography (Academic Press, San Diego, CA, 1989).
5. A.W. Johnson, G.L. Loper and T.W. Sigmon, Eds., Laser and Particle Beam Chemical Processes on Surfaces (Mater. Res. Soc., Pittsburgh, PA, 1989).
6. K. Piglmayer, Z. Toth and Z. Kantor, Appl. Surf. Sci. 86 (1995) 484.
7. K. Piglmayer, Z. Toth and Z. Kantor, in: Laser Methods of Surface Treatment and Modification, Ed. V.I. Pustovoy, Proc. SPIE 2498 (1995) 45.
8. L.V. McCarty, W.E. Reith and M.T. Simon, J. Electrochem. Soc. 121 (1974) 1372.
9. J.R. Creighton, J. Vac. Sci. Technol. A 7 (1989) 621.
10. K. Piglmayer, to be published.