Fabrication of metallic micro channels of high aspect ratio using laser-assisted thermochemical wet etching

ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2004, Pages

  Son, Seungwoo ^a   Jeong, Sungho ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

FABRICATION; LASER BEAMS; MICROCHANNELS; MORPHOLOGY; WET ETCHING;

CROSS SECTIONAL PROFILES; ETCH DEPTH; ETCHANT CONCENTRATIONS; HIGH ASPECT RATIO; LASER BEAM POWER; LASER POWER; LASER-ASSISTED; PROCESS PARAMETERS;

ASPECT RATIO;

EID: 85088736915     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5060322     Document Type: Conference Paper

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