Laser-assisted etching of titanium foil in phosphoric acid for direct fabrication of microstructures

Journal of Laser Applications

Volumn 15, Issue 4, 2003, Pages 240-245

  Shin, Y S ^a   Jeong, S H ^a  

^a Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Laser etching; Microfabrication; Thermochemical; Titanium

Indexed keywords

ETCHING; LASER BEAM EFFECTS; METAL FOIL; METALLOGRAPHIC MICROSTRUCTURE; PHOSPHORIC ACID; TEMPERATURE DISTRIBUTION; THERMOANALYSIS;

LASER ETCHING; THERMOCHEMICAL TREATMENT; WET ETCHING;

TITANIUM METALLOGRAPHY;

EID: 0242662182     PISSN: 1042346X     EISSN: None     Source Type: Journal    
DOI: 10.2351/1.1620003     Document Type: Article

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