Gas heating and throw distance for the sputter deposition of aluminum and tungsten

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 2, 2002, Pages 459-466

  Drüsedau, Tilo P ^a  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ATOMS; COMPUTER SIMULATION; GAS HEATING; MONTE CARLO METHODS; PLASMA COLLISION PROCESSES; SPUTTER DEPOSITION; TUNGSTEN;

MAGNETRON SPUTTER DEPOSITION;

MAGNETRON SPUTTERING;

EID: 0036494052     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1450586     Document Type: Article

References (15)