Electronic transport characterization of silicon wafers by laterally resolved free-carrier absorption and multiparameter fitting

Applied Physics Letters

Volumn 89, Issue 11, 2006, Pages

  Zhang, Xiren ^a   Li, Bincheng ^a   Gao, Chunming ^a  

^a INSTITUTE OF OPTICS AND ELECTRONICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; DIFFUSION; ELECTRIC CONDUCTIVITY; ELECTRON TRANSPORT PROPERTIES; NATURAL FREQUENCIES; SEMICONDUCTOR MATERIALS;

MODULATED FREE-CARRIER ABSORPTION (MFCA); MODULATION FREQUENCIES; SEMICONDUCTOR WAFERS;

SILICON WAFERS;

EID: 33748705569     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2354006     Document Type: Article

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