Infrared photocarrier radiometry of semiconductors: Physical principles, quantitative depth profilometry, and scanning imaging of deep subsurface electronic defects

Physical Review B - Condensed Matter and Materials Physics

Volumn 67, Issue 20, 2003, Pages

  Mandelis, Andreas ^a   Batista, Jerias ^a,b   Shaughnessy, Derrick ^a  

^a DEPARTMENT OF MECHANICAL AND INDUSTRIAL ENGINEERING   (Canada)

^b FEDERAL UNIVERSITY OF MARANHÃO   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM;

ARTICLE; ELECTRONICS; HEATING; INFRARED PHOTOCARRIER RADIOMETRY; METHODOLOGY; POLARIMETRY; RADIOMETRY; SEMICONDUCTOR; SIGNAL PROCESSING; SURFACE PROPERTY; THEORY; THERMAL ANALYSIS;

EID: 3142704014     PISSN: 10980121     EISSN: 1550235X     Source Type: Journal    
DOI: 10.1103/PhysRevB.67.205208     Document Type: Article

References (40)

1. A. Mandelis, R. Bleiss, and F. Shimura, J. Appl. Phys. 74, 3431 (1993).
2. A. Mandelis, A. Othonos, C. Christofides, and J. Boussey-Said, J. Appl. Phys. 80, 5332 (1996).
3. A. Othonos, C. Christofides, and A. Mandelis, Appl. Phys. Lett. 69, 821 (1996).
4. T. Ikari, A. Salnick, and A. Mandelis, J. Appl. Phys. 85, 7392 (1999).
5. M.E. Rodriguez, A. Mandelis, G. Pan, L. Nicolaides, J.A. Garcia, and Y. Riopel, J. Electrochem. Soc. 147, 687 (2000).
6. A. Mandelis and Y. Riopel, J. Vac. Sci. Technol. A 18, 705 (2000).
7. M.E. Rodriguez, A. Mandelis, G. Pan, J.A. Garcia, V. Gorodokin, and Y. Raskin, J. Appl. Phys. 87, 8113 (2000).
8. A. Mandelis, M.E. Rodriguez, Y. Raskin, and V. Gorodokin, Phys. Status Solidi A 185, 471 (2001).
9. M.E. Rodriguez, A. Mandelis, G. Pan, J.A. Garcia, and Y. Riopel, Solid-State Electron. 44, 703 (2000).
10. N. Mikoshiba and K. Tsubouchi, in Photoacoustic and Thermal-Wave Phenomena in Semiconductors, edited by A. Mandelis, (North-Holland, New York, 1987), Chap. 3
11. C. Christofides, A. Othonos, and K. Kalli, Electrochem. Soc. Proc. 29, 153 (2001).
12. A. Mandelis, R.A. Budiman, M. Vargas, and D. Wolff, Appl. Phys. Lett. 67, 1582 (1995).
13. A. Mandelis, Solid-State Electron. 42, 1 (1998).
14. C. Christofides, M. Nestoros, and A. Othonos, in Semiconductors and Electronic Materials, edited by A. Mandelis and P. Hess, Progress in Photoacoustic and Photothermal Phenomena Vol. IV (SPIE, Bellingham, WA, 2000), Chap. 4.
15. A. Mandelis, Diffusion-Wave Fields: Mathematical Methods and Green Functions (Springer-Verlag, New York, 2001), Chap. 9.
16. R.E. Wagner and A. Mandelis, Semicond. Sci. Technol. 11, 300 (1996).
17. A. Salnick, A. Mandelis, H. Ruda, and C. Jean, J. Appl. Phys. 82, 1853 (1997).
18. S.J. Sheard, M.G. Somekh, and T.M. Hiller, Mater. Sci. Eng., B 5, 101 (1990).
19. A. Rosencwaig, in Photoacoustic and Thermal-Wave Phenomena in Semiconductors, edited by A. Mandelis (North-Holland, New York, 1987), Chap. 5.
20. A. Mandelis, A. Salnick, L. Chen, J. Opsal, and A. Rosencwaig, J. Appl. Phys. 85, 1811 (1999).
21. R.E. Wagner and A. Mandelis, Semicond. Sci. Technol. 11, 289 (1996).
22. A. Mandelis and R.E. Wagner, Jpn. J. Appl. Phys., Part 1 35, 1786 (1996).
23. R.N. Hall, Inst. Electr. Eng. 106B, Suppl. 17, 923 (1959).
24. W. van Roosbroeck and W. Shockley, Phys. Rev. 94, 1558 (1954).
25. G. Kirchhoff, Abhandlungen über Emission und Absorption, edited by M. Planck (Verlag von Wilhelm Engelmann, Leipsig, 1898), pp. 11–36.
26. J.S. Blakemore, Semiconductor Statistics (Dover, New York, 1987), Chap. 4.
27. M.A. Weinstein, Am. J. Phys. 28, 123 (1960).
28. A. Bauer, Optik (Stuttgart) 29, 179 (1969).
29. G. Chen, T. Borca-Tasciuc, and R.B. Fair, J. Appl. Phys. 82, 830 (1997).
30. R. Siegel and J.R. Howell, Thermal Radiation Heat Transfer (Hemisphere, Washington, 1992).
31. P.J. Timans, J. Appl. Phys. 74, 6353 (1993).
32. F.A. Johnson, Proc. Phys. Soc. London 73, 265 (1959).
33. D.K. Schroder, R.N. Thomas, and J.C. Swartz, IEEE Trans. Electron Devices 25, 254 (1978).
34. R.A. Smith, Semiconductors, 2nd ed. (Cambridge University Press, Cambridge, 1978), pp. 118–119.
35. S.J. Sheard and M.G. Somekh, Electron. Lett. 23, 1134 (1987).
36. F. Kreit and W.Z. Black, Basic Heat Transfer (Harper & Row, New York, 1980).
37. Judson Technologies Detector Offerings; www.judtech.com
38. A. Mandelis (unpublished).
39. R.D. Tom, E.P. O’Hara, and D. Benin, J. Appl. Phys. 53, 5392 (1982).
40. M.E. Rodriguez, J.A. Garcia, A. Mandelis, C. Jean, and Y. Riopel, Appl. Phys. Lett. 74, 2429 (1999).