Structural and electrical characterization of PZT on gold for micromachined piezoelectric membranes

Applied Physics A: Materials Science and Processing

Volumn 85, Issue 2, 2006, Pages 135-140

  Robinson, M C ^a   Morris, D J ^a   Hayenga, P D ^a   Cho, J H ^a   Richards, C D ^a   Richards, R F ^a   Bahr, D F ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; MICROMACHINING; PERMITTIVITY; PIEZOELECTRIC MATERIALS; PIEZOELECTRICITY; X RAY PHOTOELECTRON SPECTROSCOPY;

COMPOSITE MEMBRANE STRUCTURE; ELECTRICAL CHARACTERIZATION; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC MEMBRANES;

LEAD COMPOUNDS;

EID: 33748702069     PISSN: 09478396     EISSN: 14320630     Source Type: Journal    
DOI: 10.1007/s00339-006-3674-1     Document Type: Article

References (23)

1. R. Ali, D.R. Mahapatra, S. Gopalakakrishnan, Sens. Actuators A 116, 424 (2004)
2. P. Muralt, A. Kholkin, M. Kohli, T. Maeder, Sens. Actuators A 53, 398 (1996)
3. S. Whalen, M. Thompson, D. Bahr, C. Richards, R. Richards, Sens. Actuators A104, 290 (2003)
4. Y. Arimoto, H. Ishiwara, Mater. Res. Soc. Bull. 29, 823 (2004)
5. H. Yu, L. Zou, K. Deng, R. Wolf, S. Tadigadapa, S. Trolier-McKinstry, Sens. Actuators A 107, 26 (2003)
6. P. Murait, A. Kholkin, M. Kohli, T. Maeder, N. Setter, Microelectron. Eng. 29, 67 (1995)
7. E. Defay, C. Millon, C. Malhaire, D. Barbier, Sens. Actuators A 99, 64 (2002)
8. K. Takemura, T. Sakuma, Y. Miyasaka, Appl. Phys. Lett. 64, 2967 (1994)
9. K. Kuribayashi, Y. Fujita, H. Isige, T. Iwanuma, Mater. Sci. Eng. B 109, 188 (2004)
10. M.C. Robinson, P.D. Hayenga, J.H. Cho, C.D. Richards, R.F. Richards, D.F. Bahr, Mater. Res. Soc. Symp. Proc. 872, J18.26 (2005)
11. P.D. Hayenga, Fabrication methods to improve performance of a piezoelectric membrane generator, Masters thesis, Washington State University (2005)
12. I. Meyyappan, A.P. Malshe, H.A. Naseem, W.D. Brown, Thin Solid Films 253, 407 (1994)
13. R.J. Miller, A. Gangulee, Thin Solid Films 69, 379 (1980)
14. G.J. Willems, D.J. Wouters, H.E. Maes, Microelectron. Eng. 29, 217 (1995)
15. L.M.R. Eakins, B.W. Olson. C.D. Richards, R.F. Richards, D.F. Bahr, J. Mater. Res. 18, 2079 (2003)
16. W.I. Lee, J.K. Lee, Mater. Res. Bull. 30, 1185 (1995)
17. G. Yu, Z. Wu, M. Sayer, J. Appl. Phys. 64, 2717 (1988)
18. J.V. Martinez, Fabrication, materials, and characterization for efficient MEMS power generation, Masters thesis, Washington State University (2004)
19. B.W. Olson, Optimization of a piezoelectric membrane generator, Masters thesis, Washington State University (2002)
20. T.M. Sullivan, Development of a novel method for measuring the transverse piezoelectric coefficients of thin piezoelectric films, Masters thesis, Washington State University (2004)
21. Y. Xiang, X. Chen, J.J. Vlassak, J. Mater. Res. 20, 2360 (2005)
22. J.F. Shepard Jr., PJ. Moses, S. Trolier-McKinstry, Sens. Actuators A 71, 133 (1998)
23. E. Bonnotte, P. Delobelle, L. Bomier, J. Mater. Res. 12, 2234 (1997)