Study of the structure and electrical properties of the copper nitride thin films deposited by pulsed laser deposition

Applied Surface Science

Volumn 252, Issue 22, 2006, Pages 8001-8004

  Gallardo Vega, C ^a   de la Cruz, W ^b  

^a CENTRO DE INVESTIGACIÓN CIENTÍFICA Y DE EDUCACIÓN SUPERIOR DE ENSENADA   (Mexico)

^b CENTRO DE CIENCIAS DE LA MATERIA CONDENSADA   (Mexico)

Author keywords

Characterization methods; Copper nitride; Pulsed laser deposition; Thin films

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COPPER COMPOUNDS; NITROGEN; PULSED LASER DEPOSITION; SILICON; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

CHARACTERIZATION METHODS; COPPER NITRIDE THIN FILMS; STOICHIOMETRIC FILMS;

THIN FILMS;

EID: 33748601848     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.10.007     Document Type: Article

References (19)

1. S.T. Oyama, in: S. Ted Oyama (Ed.), The Chemistry of Transition Metal Carbides and Nitrides, 1996, pp. 1-27.
2. JCPDS-ICSS, International Centre for Diffraction Data, Newtown Square, PA, USA.
3. Terada S., Tanaka H., and Kubota K. J. Cryst. Growth 94 (1989) 567
4. Asano M., Umeda K., and Tasaki A. Jpn. J. Appl. Phys. 29 (1990) 1985
5. Maya L. Mater. Res. Soc. Symp. Proc. 282 (1993) 203
6. Maya L.J. Vac. Sci. Technol. 11 (1993) 603
7. Maruyama T., and Morishita T. J. Appl. Phys. 78 6 (1995) 4104
8. Maruyama T., and Morishita T. Appl. Phys. Lett. 69 (1996) 890
9. Liu Z.Q., Wang W.J., Wang T.M., Chao S., and Zheng S.K. Thin Solid Films 325 (1998) 55
10. Wang D.Y., Nakamine N., and Hayashi Y. J. Vac. Sci. Technol. A 16 (1998) 2084
11. Hahn U., and Weber W. Phys. Rev. B 53 (1996) 12684
12. Moreno-Armenta M.G., Martínez-Ruiz A., and Takeuchi N. Solid State Sci. 6 (2004) 9-14
13. Pierson J.F. Vacuum 66 (2002) 59
14. Samano E.C., Machorro R., Soto G., and Cota-Araiza L. Appl. Surf. Sci. 127-129 (1998) 1005
15. Celref for windows unit cell refinement program, developed by J. Laugier, B. Bochu, Ecole Nationale Supérieure de Physique de Grenoble (INPG), Domaine Universitaire BP 46, 38402 Saint Martin d'Hères. Http://www.inpg.fr/LMGP.
16. Soto G., Diaz J.A., and de la Cruz W. Matter Lett. 57 (2003) 4130-4133
17. Soto G., de la Cruz W., and Farías M.H. J. Electron. Spectrosc. Relat. Phemon. 135 (2004) 27-39
18. Tougaard S. Surf. Sci. 216 (1989) 343
19. Kim K.J., Kim J.H., and Kang J.H. J. Cryst. Growth 222 (2001) 767-772