Structural and optical characterization of Cu3N films prepared by reactive RF magnetron sputtering

Journal of Crystal Growth

Volumn 222, Issue 4, 2001, Pages 767-772

  Joo Kim, Kwang ^a   Hyuk Kim, Jong ^a   Hoon Kang, Ji ^a  

^a Konkuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER COMPOUNDS; CRYSTAL ORIENTATION; MAGNETRON SPUTTERING; NITRIDES; NITRIFICATION; PARTIAL PRESSURE; PRESSURE EFFECTS; SEMICONDUCTING FILMS; SILICON WAFERS; SPUTTER DEPOSITION; THERMAL EFFECTS; TRANSPARENCY;

COPPER NITRIDE;

OPTICAL FILMS;

EID: 0342526957     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-0248(00)00968-4     Document Type: Article

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