Integration of GaN thin films with silicon substrates by fusion bonding and laser lift-off

Chinese Optics Letters

Volumn 4, Issue 7, 2006, Pages 416-418

  Wang, Ting ^a   Guo, Xia ^a   Fang, Yuan ^a   Liu, Bin ^a   Shen, Guangdi ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BONDING; ENERGY DISPERSIVE SPECTROSCOPY; EXCIMER LASERS; FUSION REACTIONS; GALLIUM NITRIDE; METALLORGANIC CHEMICAL VAPOR DEPOSITION; PHOTOLUMINESCENCE; SAPPHIRE; SCANNING ELECTRON MICROSCOPY; SILICON; SOLID SOLUTIONS; SUBSTRATES; SURFACES; X RAY SPECTROMETERS;

ENERGY DISPERSIVE X RAY SPECTROMETER (EDS); FUSION BONDING; LASER LIFT OFF (LLO);

THIN FILMS;

EID: 33748468568     PISSN: 16717694     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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