A mechanistic study of GaN laser lift-off

Physica Status Solidi (A) Applied Research

Volumn 194, Issue 2 SPEC., 2002, Pages 559-562

  Bret, T ^a   Wagner, V ^a   Martin, D ^a   Hoffmann, P ^a   Ilegems, M ^a  

^a EPFL   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

CARRIER CONCENTRATION; DELAMINATION; EXCIMER LASERS; INTERFACES (MATERIALS); LASER DAMAGE; OPTICAL MICROSCOPY; POLISHING; PYROLYSIS; SAPPHIRE; SPECKLE; THIN FILMS; VAPOR PHASE EPITAXY;

HYDRIDE VAPOR PHASE EPITAXY; LASER INDUCED DELAMINATION; LASER LIFT OFF TECHNIQUE; SAPPHIRE WAFERS;

GALLIUM NITRIDE;

EID: 0036960017     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200212)194:2<559::AID-PSSA559>3.0.CO;2-S     Document Type: Article

References (16)

1. S. J. Pearton, J. App. Phys. 86, 1 (1999).
2. O. Parillaud, V. Wagner, H. J. Buhlmann, and M. Ilegems, phys. stat. sol. (a) 176, 655 (1999).
3. V. Wagner, O. Parillaud, H. J. Buhlmann, and M. Ilegem, phys. stat. sol. (a) 176, 429 (1999).
4. M. K. Kelly, O. Ambacher, R. Dimitrov, R. Handschuh, and M. Stutzmann, phys. stat. sol. (a) 159, R3 (1997).
5. W. S. Wong, T. Sands, and N. W. Cheung, Appl. Phys. Lett. 72, 599 (1998).
6. C. R. Miskys, M. K. Kelly, O. Ambacher, G. Martinez-Criado, and M. Stuzmann, Appl. Phys. Lett. 77, 1858 (2000).
7. M. K. Kelly, R. P. Vaudo, V. M. Phanse, L. Gorgens, O. Ambacher, and M. Stutzmann, Jpn. J. Appl. Phys. Lett. 38, L217 (1999).
8. M. Kneissl, W. S. Wong, D. W. Treat, M. Teepe, N. Miyashita, and N. M. Johnson, IEEE J. Sel. Top. Quantum Electron. 7, 188 (2001).
9. S. Nakamura, Appl. Phys. Lett. 72, 2014 (1998).
10. O. Kryliouk, M. Reed, T. Dann, T. Anderson, and B. Chai, Mater. Sci. Eng. B 66, 26 (1999).
11. E. A. Stach, M. Kelsch, E. C. Nelson, W. S. Wong, T. Sands, and N. W. Cheung, Appl. Phys. Lett. 77, 1819 (2000).
12. M. K. Kelly, O. Ambacher, B. Dahlheimer, G. Gross, R. Dimitrov, H. Angerer, and M. Stutzmann, Appl. Phys. Lett. 69, 1749 (1996).
13. W. S. Wong, Ph.D. Thesis, Univ. of California, Berkeley (1999).
14. W. S. Wong, A. B. Wengrow, Y. Cho, A. Salleo, N. J. Quitoriano, N. W. Cheung, and T. Sands, J. Electron. Mater. 28, 1409 (1999).
15. J. Arokiaraj, IPAP Conference Series 1, 754 (1998).
16. P. R. Tavernier and D. R. Clarke, J. Appl. Phys. 89, 1527 (2001).