Effects of step-deposition on structures and properties of transparent conducting aluminum-doped zinc oxide films prepared by DC magnetron sputtering

Solar Energy Materials and Solar Cells

Volumn 90, Issue 18-19, 2006, Pages 3444-3448

  Tohsophon, T ^a   Sirikulrat, N ^a  

^a CHIANG MAI UNIVERSITY   (Thailand)

Author keywords

Aluminum doped zinc oxide thin films; DC magnetron sputtering; Transparent conductor

Indexed keywords

ALUMINUM COMPOUNDS; MAGNETRON SPUTTERING; OPACITY; SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION); THERMAL EFFECTS; ZINC OXIDE;

ALUMINUM DOPED ZINC OXIDE THIN FILMS; DC MAGNETRON SPUTTERING; GLASS PLATE; TRANSPARENT CONDUCTOR;

CONDUCTIVE FILMS;

EID: 33748295592     PISSN: 09270248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.solmat.2006.04.012     Document Type: Article

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