Application of conductive AFM on the electrical characterization of single-bit marginal failure

IEEE Transactions on Device and Materials Reliability

Volumn 6, Issue 2, 2006, Pages 186-189

  Bailon, Michelle F ^a   Salinas, Peter Floyd F ^a   Arboleda, Jan Paul S ^a  

^a Intel Technology Philippines Inc   (Philippines)

Author keywords

Conductive atomic force microscopy (AFM); Defect localization; Failure analysis (FA)

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; FAILURE ANALYSIS; INTEGRATED CIRCUITS; TRANSISTORS;

CONDUCTIVE ATOMIC FORCE MICROSCOPY (AFM); DEFECT LOCALIZATION; SINGLE-BIT FAILURES;

CONDUCTIVE MATERIALS;

EID: 33748098531     PISSN: 15304388     EISSN: 15304388     Source Type: Journal    
DOI: 10.1109/TDMR.2006.877864     Document Type: Conference Paper

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