SCOPUS 정보 검색 플랫폼

Proceedings of the 30th International Symposium for Testing and Failure Analysis, ISTFA 2004

Volumn , Issue , 2004, Pages 42-46

Current Image Atomic Force Microscopy (CI-AFM) combined with Atomic Force Probing (AFP) for location and characterization of advanced technology node

(2) Tong, Tom X a Erickson, A N b

a INTEL CORPORATION (United States)

b Multiprobe Inc (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE PROBING (AFP); CURRENT IMAGE-ATOMIC FORCE MICROSCOPY (CI-AFM); ELECTRICAL FAILURE ANALYSIS (EFA); PASSIVE VOLTAGE CONTRAST (PVC);

ELECTRIC CURRENTS; ELECTRIC POTENTIAL; FAILURE ANALYSIS; INTEGRATED CIRCUITS; ION BEAMS; MATHEMATICAL MODELS; MOS DEVICES; PROBES; STATIC RANDOM ACCESS STORAGE; TRANSISTORS;

ATOMIC FORCE MICROSCOPY;

EID: 10444254019 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (49)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.