SCOPUS 정보 검색 플랫폼

Volumn 43, Issue 9-11, 2003, Pages 1687-1692

A novel application of C-AFM: Deep sub-micron single probing for IC failure analysis

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTAL DEFECTS; FAILURE ANALYSIS; GATES (TRANSISTOR); SEMICONDUCTOR JUNCTIONS; SEMICONDUCTOR MATERIALS; SURFACE TOPOGRAPHY;

PHYSICAL FAILURE ANALYSIS (PFA);

INTEGRATED CIRCUITS;

EID: 0042694329 PISSN: 00262714 EISSN: None Source Type: Journal
DOI: 10.1016/S0026-2714(03)00335-4 Document Type: Conference Paper

Times cited : (11)

References (9)

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- Application Notes

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