Fast yield-driven fracture for variable shaped-beam mask writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6283 II, Issue , 2006, Pages

  Kahng, Andrew B ^a   Xu, Xu ^b   Zelikovsky, Alex ^c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c GEORGIA STATE UNIVERSITY   (United States)

Author keywords

Fracture; Mask data preparation; Variable Shaped Beam Mask Writing; Yield driven

Indexed keywords

MASK DATA PREPARATION; VARIABLE SHAPED-BEAM MASK WRITING; YIELD-DRIVEN;

DATA REDUCTION; ELECTRON BEAMS; HEURISTIC METHODS; LINEAR PROGRAMMING; TRANSISTORS;

MASKS;

EID: 33748044320     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.681805     Document Type: Conference Paper

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