High performance fracturing for variable shaped beam mask writing machines

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5130, Issue , 2003, Pages 648-659

  Schulze, Steffen ^a   Sahouria, Emile ^a   Miloslavsky, Eugene ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; BOUNDARY CONDITIONS; COMPUTER AIDED SOFTWARE ENGINEERING; COMPUTER NETWORKS; ELECTRON BEAMS; IMAGE ANALYSIS; INTEGRATED CIRCUIT MANUFACTURE; LITHOGRAPHY; PARALLEL PROCESSING SYSTEMS; WSI CIRCUITS;

CRITICAL DIMENSION; DATA CONVERSION FLOW; OPTIMIZED DATA PREPARATION; PATTERN COMPLEXITY;

MASKS;

EID: 1642474067     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.504274     Document Type: Conference Paper

References (5)

1. S. Schulze, P. LaCour, P.Buck, "A GDS-based Mask Data Preparation Flow - Data Volume Containment by Hierarchical Data Processing", Proc. of SPIE 4889, Bacus 2002
2. W. Krieger, C. Nasamran, "Efficient automated tapeout system", Proc. of SPIE 4186, p. 140-147
3. S.Schulze "A new definition of fracturing", Bacus news 9/2002
4. N. Cobb, E. Sahouria, "Hierarchical GDSII based fracturing and jobdeck system", Proc. of SPIE 4562
5. N. Cobb, W. Zhang, "High performance hierarchical fracturing", Proc. of SPIE 4754 p. 91-96