Yield- And cost-driven fracturing for variable shaped-beam mask writing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5567, Issue PART 1, 2004, Pages 360-371

  Kahng, Andrew B ^a   Xu, Xu ^a   Zelikovsky, Alex ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b GEORGIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGER LINEAR PROGRAMMING (ILP); MASK MANUFACTURING; RETICLE ENHANCEMENT TECHNOLOGY (RET); VARIABLE SHAPED BEAMS (VSB);

CONSTRAINT THEORY; COSTS; IMAGING TECHNIQUES; INTEGER PROGRAMMING; INTEGRATED CIRCUIT LAYOUT; INTEGRATED CIRCUITS; LINEAR PROGRAMMING; OPTIMIZATION; PATTERN RECOGNITION;

MASKS;

EID: 19844370609     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.568526     Document Type: Conference Paper

References (16)

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