High performance hierarchical fracturing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4754, Issue , 2002, Pages 91-96

  Cobb, Nick ^a   Zhang, Weidong ^a  

^a MENTOR GRAPHICS CORPORATION   (United States)

Author keywords

Fracturing; Hierarchy; Mask data preparation

Indexed keywords

ALGORITHMS; DATA FLOW ANALYSIS; DATA STORAGE EQUIPMENT; HIERARCHICAL SYSTEMS;

MASK DATA PREPARATION;

MASKS;

EID: 0036456512     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.476933     Document Type: Conference Paper

References (3)

1. Nick Cobb and Emile Sahouria, "A Hierarchical GDSII-Based Fracturing and Job Deck System", BACUS Symposium, Monterey, CA, Oct 2001.
2. MEBES and MODE 5 are registered trademarks of Etec Systems, Inc.
3. CALIBRE is a registered trademark of Mentor Graphics Corporation.