Spectral reflectrometry and white-light interferometry used to measure thin films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5457, Issue , 2004, Pages 756-764

  Hlubina, Petr ^a  

^a SILESIAN UNIVERSITY IN OPAVA   (Czech Republic)

Author keywords

Fourier transform method; Michelson interferometer; Phase spectrum; Refractive index dispersion; Spectral interferometry; Spectral reflectometry; Substrate; Thickness; Thin films; White light source

Indexed keywords

FAST FOURIER TRANSFORMS; INTERFEROMETRY; REFRACTIVE INDEX; SPECTRUM ANALYSIS; SUBSTRATES; THIN FILMS;

MICHELSON INTERFEROMETERS; PHASE SPECTRUM; REFRACTIVE INDEX SUBSTRATES; SPECTRAL INTERFEROMETRY; SPECTRAL REFLECTOMETRY; WHITE-LIGHT SOURCE;

REFLECTOMETERS;

EID: 10044226038     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.543775     Document Type: Conference Paper

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