Photochemical studies on bottom anti-reflective coatings

Journal of Photopolymer Science and Technology

Volumn 19, Issue 3, 2006, Pages 343-347

  Guerrero, Douglas J ^a   Mercado, Ramil ^a   Washburn, Carlton ^a   Meador, Jim ^a  

^a BREWER SCIENCE INC   (United States)

Author keywords

BARC; PEB; Photosensitive; Wet developable

Indexed keywords

EID: 33747426969     PISSN: 09149244     EISSN: 13496336     Source Type: Journal    
DOI: 10.2494/photopolymer.19.343     Document Type: Article

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