Development of 193-nm wet BARCs for implant applications

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6153 II, Issue , 2006, Pages

  Meador, Jim ^a   Beaman, Carol ^a   Lowes, Joyce ^a   Washburn, Carlton ^a   Mercado, Ramil ^a   Nagatkina, Mariya ^a   Stroud, Charlyn ^a  

^a BREWER SCIENCE INC   (United States)

Author keywords

193 nm microlithography; Anti reflective; BARC; Implant; Wet developable

Indexed keywords

LITHOGRAPHY; NANOTECHNOLOGY; ORGANIC SOLVENTS; PHOTORESISTS; REFLECTION; SPIN COATING;

193-NM MICROLITHOGRAPHY; ANTI-REFLECTIVE COATINGS; BOTTOM ANTI-REFLECTIVE COATINGS (BARC); IMPLANT; WET-DEVELOPABLE BARC;

INTEGRATED CIRCUIT MANUFACTURE;

EID: 33745601142     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.657597     Document Type: Conference Paper

References (8)

1. Xie Shao, Alice Guerrero, and Yiming Gu, "Wet-Developable Organic Anti-Reflective Coatings for Implant Layer Applications," SEMICON China 2004 SEMI Technology Symposium, pp. 1-9, March 17, 2004; www.brewerscience.com/ arc_news/arc_publications.html.
2. Xie Shao, Alice Guerrero, and Yiming Gu, "Wet-Developable Organic Anti-Reflective Coatings for Implant Layer Applications," Leuven Belgium, pp. 1-19, April 28, 2004; www.brewerscience.com/arc_symp/arc_symp_pres.html.
3. Jim Meador, Udayan Senapati, Carol Beaman, Joyce Lowes, Alice Guerrero, Carlton Washburn, Ramil Mercado, and Yohei Kinoshita, "193nm Wet BARC for Implant Applications," Grenoble France, pp. 1-29, May 3, 2005; www.brewerscience.com/arc_symp/arc_symp_pres.html.
4. Doug J. Guerrero and Tonya Trudgeon, "A New Generation of Bottom Anti-reflective Coatings (BARCs): Photodefinable BARCs," Proc. SPIE, 5039, pp. 129-135, 2003.
5. Jim D. Meador, Doug Holmes, William L. DiMenna, Mariya Nagatkina, Michael Rich, Tony D. Flaim, Randy Bennett, and Ichiro Kobayashi, "193-nm Multilayer Imaging Systems," Proc. SPIE, 5039, pp. 948-957, 2003.
6. Jim D. Meador, Douglas J. Guerrero, Gu Xu, Xie Shao, Norman Dobson, James Claypool, and Kelly Nowak "Recent Progress in 193 nm Antireflective Coatings," Proc. SPIE, 3678, pp. 800-809, 1999.
7. Jim D. Meador, Xie Shao, Mandar Bhave, Chris Cox, John Thompson, Debra Thomas, Stephen Gibbons, Ashley Farnsworth, and Michael Rich, "Improved Crosslinkable Polymeric Binders for 193-nm Bottom Antireflective Coatings (BARCs)," Proc. SPIE, 4345, pp. 846-854, 2001.
8. Isabelle Guilmeau, Alice F. Guerrero, Vincent Blain, Stéphanie Kremer, Vincent Vachellerie, Damien Lenoble, Patricia Nogueria, Sébastien Mougel, and Jean-Damien Chapon, "Evaluation of wet-developable KrF organic BARC to improve CD uniformity for implant application," Proc. SPIE, 5376, pp. 461-470, 2004. *jmeador@brewerscience.com; 1 573 364-0300