Process optimization of developer soluble organic BARC and its characteristics in CMOS devices

Progress in Biomedical Optics and Imaging - Proceedings of SPIE

Volumn 5753, Issue II, 2005, Pages 690-698

  Lim, Yeon Hwa ^a   Kim, Young Keun ^a   Choi, Jae Sung ^a   Lee, Jeong Gun ^a  

^a MagnaChip Semiconductor Ltd   (South Korea)

Author keywords

Developer soluble KrF BARC; Device performance; Pattern density

Indexed keywords

ALKALINE EARTH METALS; COATING TECHNIQUES; DRY ETCHING; DYES; LEAKAGE CURRENTS; OPTIMIZATION; PHOTORESISTS; PROCESS CONTROL;

DEVICE PERFORMANCE; ELECTRICAL DATA; PATTERN DENSITY; PHOTO PROCESSES; THERMAL PROCESSES;

CMOS INTEGRATED CIRCUITS;

EID: 24644486617     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.600437     Document Type: Conference Paper

References (2)

1. C. Cox et al. Proceeding of SPIE-The International Society for Optical Engineering 878-882(5039), 2003.
2. T. Katayama et al. Proceeding of SPIE-The International Society for Optical Engineering 968-973(5377), 2004.