Piezoelectrically actuated tunable capacitor

Journal of Microelectromechanical Systems

Volumn 15, Issue 4, 2006, Pages 745-755

  Lee, Chuang Yuan ^a   Kim, Eun Sok ^a  

^a University of Southern California   (United States)

Author keywords

Parylene; Tunable capacitor; Zinc oxide

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; MICROMACHINING; SEMICONDUCTOR DEVICE MANUFACTURE; TUNING; ZINC OXIDE;

PARYLENE; PLASMA-ENHANCED CHEMICAL-VAPOR DEPOSITION; TUNABLE CAPACITOR;

PIEZOELECTRIC MATERIALS;

EID: 33747423682     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.878886     Document Type: Article

References (13)

1. L. Larson et al., "Micromachined microwave actuator (MIMAC) technology - a new tuning approach for microwave integrated circuits," in Proc. IEEE Microw. Millimeter-Wave Monolithic Circuits Symp., 1991, pp. 21-30.
2. T. G. S. M. Rijks, J. T. M. van Beek, P. G. Steeneken, M. J. E. Ulenaers, J. De Coster, and R. Puers, "RF MEMS tunable capacitors with large tuning ratio," in Proc. IEEE Int. Micro Electro Mechanical Syst. Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 777-780.
3. Z. Xiao, W. Peng, R. F. Woffenbuttel, and K. R. Farmer, "Micromachined variable capacitor with wide tuning range," in Proc. Solid-State Sens. Actuator Workshop, Hilton Head Island, SC, Jun. 2-6, 2002, pp. 346-349.
4. R. Borwick, P. Stupar, J. DeNatale, R. Anderson, C. Tsai, and K. Garrett, "A high Q, large tuning range, tunable capacitor for RF applications," in Proc. IEEE Int. Micro Electro Mechanical Syst. Conf., Las Vegas, NV, Jan. 20-24, 2002, pp. 669-672.
5. H. D. Nguyen, D. Hah, P. R. Patterson, R. Chao, W. Piyawattanametha, E. K. Lau, and M. C. Wu, "Angular vertical comb-driven tunable capacitor with high-tuning capabilities," J. Microelectromech. Syst., vol. 13, no. 3, pp. 406-413, June 2004.
6. J. Y. Park, Y. J. Yee, H. J. Nam, and J. U. Bu, "Micromachined RF MEMS tunable capacitors using piezoelectric actuators," in Proc. IEEE MTT-S Int. Microwave Symp. Dig., 2001, vol. 3, pp. 2111-2114.
7. Z. Feng, W. Zhang, B. Su, K. F. Harsh, K. C. Gupta, V. Bright, and Y. C. Lee, "Design and modeling of RF MEMS tunable capacitors using electro-thermal actuators," in Proc. IEEE MTT-S Int. Microwave Symp. Dig., 1999, vol. 4, pp. 1507-1510.
8. M. J. Vellekoop, C. C. G. Visser, P. M. Sarro, and A. Venema, "Compatibility of zinc oxide with silicon IC processing," Sens. Actuators A, Phys., vol. A23, pp. 1027-1030, 1990.
9. D. DeVoe and A. P. Pisano, "Modeling and optimal design of piezoelectric cantilever microactuators," J. Microelectromech. Syst., vol. 6, pp. 266-270, Sep. 1997.
10. M. S. Weinberg, "Working equations for piezoelectric actuators and sensors," J. Microelectromech. Syst., vol. 8, no. 4, pp. 529-533, Dec. 1999.
11. T. A. Harder, T.-J. Yao, Q. He, C.-Y. Shih, and Y.-C. Tai, "Residual stress in thin-film parylene-c," in Proc. IEEE Int. Micro Electro Mechanical Syst. Conf., Las Vegas, NV, Jan. 20-24, 2002, pp. 435-438.
12. M. V. Salapaka, H. S. Bergh, J. Lai, A. Majumdar, and E. McFarland, "Multi-mode noise analysis of cantilevers for scanning probe microscopy," J. Appl. Phys., vol. 81, pp. 2480-2487, Mar. 1997.
13. F. J. von Preissig, H. Zeng, and E. S. Kim, "Measurement of piezoelectric strength of ZnO thin films for MEMS applications," J. Smart Mater. Struct., vol. 7, pp. 396-403, Jun. 1998.