A force-feedback control system for micro-assembly

Journal of Micromechanics and Microengineering

Volumn 16, Issue 9, 2006, Pages 1861-1868

  Lu, Zhe ^a   Chen, Peter C Y ^a   Ganapathy, Anand ^b   Zhao, Guoyong ^a   Nam, Joohoo ^a   Yang, Guilin ^c   Burdet, Etienne ^d   Teo, Cheeleong ^a   Meng, Qingnian ^a   Lin, Wei ^c  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^c SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^d IMPERIAL COLLEGE LONDON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

ASSEMBLY; CONTROL SYSTEMS; FEEDBACK CONTROL; MICROACTUATORS; MICROSENSORS;

FEEDBACK SYSTEMS; FORCE CONTROL SYSTEM; MICRO-ASSEMBLY;

COMPOSITE MICROMECHANICS;

EID: 33747236703     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/16/9/015     Document Type: Article

References (25)

1. Hsu T R 2005 Micro assembly: a technology on the frontier of new industrial automation in Int. Conf. on Automat. Tech. pp 1-16
2. Research in the assembly of micro-devices, New Mexico State University (available Online at http://web.nmsu.edu/~jcecil/current-initiatives/Micro_Assembly_Research/ Micro_Assembly_Research.htm)
3. Dechev N, Cleghorn W L and Mills J K 2003 Microassembly of 3-D MEMS structures utilizing a MEMS microgripper with a robotic manipulator IEEE Int. Conf. on Robot. and Automat. pp 3193-9
4. Jason J G and Nicholas G D 2003 Force control of linear motor stages for microassembly Proc. ASME Int. Mechanical Eng. and Congress pp 1-9
5. Nelson B J, Zhou Y and Vikramaditya B 1998 Sensor-based microassembly of hybrid MEMS devices IEEE Control Syst. Mag. 18 35-45
6. Brussel H V, Peris J, Reynaerts D, Delchambre A, Reinhart G, Roth N, Weck M and Zussman E 2000 Assembly of microsystems CIRP Ann. 2 451-72
7. Yang G, Gaines J A and Nelson B J 2001 A flexible experimental workcell for efficient and reliable wafer-level 3D microassembly Proc. IEEE Int. Conf. on Robot. and Automat. pp 133-8
8. Popa D, Byoung H K, Jeongsik S and Jie Z 2002 Reconfigurable micro-assembly system for photonics applications Proc. IEEE Int. Conf. on Robot. and Automat. pp 1495-500
9. Shen Y T, Xi N, Li W J and Tan J D 2003 A high sensitivity force sensor for microassembly: design and experiments IEEE/ASME Int. Conf. on Adv. Intell. Mechatron. pp 703-8
10. Shacklock A and Sun W 2005 Integrating microscope and perspective views Proc. IEEE Int. Conf. on Robot. and Automat. pp 454-9
11. Sun Y, Wan K T, Roberts K P, Bischof J C and Nelson B J 2003 Mechanical property characterization of mouse zona pellucida IEEE Nanobiosci. 2 279-86
12. Kim D H, Sun Y, Yun S, Lee S H and Kim B 2005 Investigating chorion softening of zebrafish embryos with a microrobotic force sensing system J. Biomech. 38 1359-63
13. Haliyo D S, Venture G, Régnier S and Guinot J C 2005 An overview of the micro-manipulation system [mü] MAD Proc. IEEE Int. Conf. on Adv. Intell. Mechatron. pp 390-5
14. Lew J Y 1997 Contact control of flexible micro/macro-manipulators Proc. IEEE Int. Conf. on Robot. and Automat. pp 2850-5
15. Kaneko K, Tokashiki H, Tanie K and Komoriya K 1997 Impedance shaping based on force feedback bilateral control in macro-micro teleoperation system Proc. IEEE Int. Conf. on Robot. and Automat. pp 710-7
16. Kallio P, Zhou Q and Koivo H 1998 Control issues in micromanipulation IEEE Int. Symp. on Micromechatronics and Human Science pp 135-41
17. Carrozza M C, Eisinberg A, Menciassi A, Campolo D, Micera S and Dario P 2000 Towards a force-controlled microgripper for assembling biomedical microdevices J. Micromech. Microeng. 10 271-6
18. Lu Z, Chen P C Y and Lin W 2006 Force sensing and control in micromanipulation IEEE Trans. Syst. Man Cybern. C at press
19. Kim D H, Kim B and Kang H J 2004 Development of a piezoelectric polymer-based sensorized microgripper for micromanipulation and microassembly Microsyst. Technol. 10 275-80
20. Zhang H, Bellouard Y, Burdet E, Clavel R, Poo A N and Hutmacher D W 2004 Shape memory alloy microgripper for robotic microassembly of tissue engineering scaffolds Proc. IEEE Int. Conf. on Robot. and Automat. pp 4918-24
21. Volpe R and Khosla P K 1993 A theoretical and experimental investigation of explicit force control strategies for manipulators IEEE Trans. Autom. Control 38 1634-50
22. Zhang H 2005 Robotic microassembly of tissue engineering scaffold PhD Thesis Mechanical Engineering Department, National University of Singapore
23. Zhang H, Burdet E, Poo A N and Hutmacher D W 2006 Microassembly fabrication of tissue engineering scaffolds with customized design IEEE Trans. Autom. Control at press
24. Zhang H, Burdet E, Hutmacher D W and Poo A N 2003 Robotic microassembly of scaffolds for tissue engineering (Video) IEEE Int. Conf. on Robot. and Automat. (Taipei Taiwan)
25. Sato T, Kameya T, Miyazaki H and Hatamura Y 1995 Hand-eye system in nano manipulation world IEEE Int. Conf. on Robot. and Automat. pp 59-66