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Solid-State Electronics

Volumn 50, Issue 7-8, 2006, Pages 1355-1358

Growth and characterization of indium oxide diodes prepared by reactive magnetron sputtering

(2) Chen, Lung Chien a Liu, Sien Chang a

a NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY (Taiwan)

Author keywords

Cr Pt Au; Indium oxide diode; Ni Au; Reactive magnetron sputtering

Indexed keywords

ANNEALING; DOPING (ADDITIVES); ELECTRIC CURRENTS; ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; HEAT TREATMENT; INDIUM COMPOUNDS; MAGNETRON SPUTTERING; SYNTHESIS (CHEMICAL); THIN FILMS;

CR/PT/AU; INDIUM OXIDE DIODE; NI/AU; REACTIVE MAGNETRON SPUTTERING;

SEMICONDUCTOR DIODES;

EID: 33747163573 PISSN: 00381101 EISSN: None Source Type: Journal
DOI: 10.1016/j.sse.2006.05.013 Document Type: Article

Times cited : (5)

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