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Journal of Crystal Growth

Volumn 241, Issue 1-2, 2002, Pages 165-170

Optical and electrical properties of InN grown by radio-frequency reactive sputtering

(3) Motlan, a Goldys, E M a Tansley, T L a

a MACQUARIE UNIVERSITY (Australia)

Author keywords

A1. Characterisation; A1. Radio frequency; B1. Nitrides; B2. Semiconducting In compounds

Indexed keywords

AGING OF MATERIALS; ANNEALING; CARRIER CONCENTRATION; CHARACTERIZATION; CHEMISORPTION; SEMICONDUCTING INDIUM COMPOUNDS; SPUTTERING;

REACTIVE SPUTTERING;

THIN FILMS;

EID: 0036566521 PISSN: 00220248 EISSN: None Source Type: Journal
DOI: 10.1016/S0022-0248(02)01155-7 Document Type: Article

Times cited : (75)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.