Fabrication and characteristics of Si piezoresistive micropressure sensors for tactile imaging devices

Journal of the Korean Physical Society

Volumn 49, Issue 1, 2006, Pages 37-41

  Chung, Gwiy Sang ^a  

^a University of Ulsan   (South Korea)

Author keywords

Electrochemical etch stop; Piezoresistive; Pressure sensor; Tactile imaging device

Indexed keywords

EID: 33747056884     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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