Fabrication and temperature coefficient compensation technology of low cost high temperature pressure sensor

Sensors and Actuators, A: Physical

Volumn 120, Issue 2, 2005, Pages 468-473

  Wang, Quan ^a   Ding, Jianning ^a   Wang, Wenxiang ^b  

^a JIANGSU UNIVERSITY   (China)

^b Kunshan Shuangqiao Sensor Measurement Controlling Co Ltd   (China)

Author keywords

Compensation circuitry; Fabrication; High temperature pressure sensor; SIMOX

Indexed keywords

COSTS; HIGH TEMPERATURE EFFECTS; MICROMACHINING; SENSITIVITY ANALYSIS; STRAIN; SYNTHESIS (CHEMICAL);

COMPENSATION CIRCUITRY; HIGH TEMPERATURE PRESSURE SENSOR; SEPARATION BY IMPLANTED OXYGEN (SIMOX); TEMPERATURE OF COEFFICIENT OF OFFSET (TCO);

PARTIAL PRESSURE SENSORS;

EID: 17644389161     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2005.01.036     Document Type: Article

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