Electrical characterization of carbon nanofibers for on-chip interconnect applications

2005 5th IEEE Conference on Nanotechnology

Volumn 1, Issue , 2005, Pages 431-434

  Ngo, Quoc ^a,b   Krishnan, Shoba ^a   Cassell, Alan M ^b   Ominami, Yusuke ^a,c   Li, Jun ^b   Meyyappan, M ^b   Yang, Cary Y ^a  

^a Santa Clara University   (United States)

^b NASA AMES RESEARCH CENTER   (United States)

^c HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

Author keywords

Carbon nanofiber; Interconnect; ULSI

Indexed keywords

ELECTRIC VARIABLES MEASUREMENT; ELECTRIC WIRING; ELECTRICAL ENGINEERING; MATERIALS SCIENCE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; ULSI CIRCUITS;

CNF ARRAYS; INTERCONNECT; NANOFIBERS; ON-CHIP INTERCONNECT INTEGRATION;

FIBERS;

EID: 33746977255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2005.1500790     Document Type: Conference Paper

References (13)

1. F. Kreupl, A. P. Graham, W. Steinhogl, M. Liebau, G. S. Duesberg, R. Seidel, and E. Unger, "Carbon nanotubes for interconnect applications", IEDM Tech. Dig. 2005.
2. W. Hoenlein, F. Kreupl, G. S. Duesberg, A.P. Graham, M. Liebau, R. Seidel, E. Unger, "Carbon nanotubes for microelectronics: status and future prospects", Mat. Sci. Eng. C, vol. 23, pp. 663-669, 2003.
3. M. Nihei, M. Horibe, A. Kawabata, and Y. Awano, "Carbon nanotube vias for future LSI interconnects", Proc. IEEE Intl. Interconnect Tech. Conf. 2004, pp. 251-253.
4. Q. Ngo, D. Petranovic, S. Krishnan, A. M. Cassell, Q. Ye, J. Li, M. Meyyappan, and C. Y. Yang, "Electron transport through metal-multiwall carbon nanotube interfaces", IEEE Trans. Nanotechnology, vol. 3, pp. 311-317, 2004
5. J. Li, Q. Ye, A. Cassell, H. T. Ng, R. Stevens, J. Han, and M. Meyyappan, "Bottom-up approach for carbon nanotube interconnects", Appl. Phys. Lett., vol. 82, pp. 2491-2493, 2003.
6. L. Zhang, D. Austin, V. I. Merkulov, A. V. Meleshko, Kate L. Klein, M. A. Guillorn, D. H. Lowndes, and M. L. Simpson, "Four-probe charge transport measurements on individual vertically aligned carbon nanofibers", Appl. Phys. Lett., vol. 84, pp. 3972-3974, 2004.
7. B. A. Cruden, A. M. Cassell, Q. Ye, and M. Meyyappan, "Reactor design considerations in the hot filament/direct current plasma synthesis of carbon nanofibers", J. Appl. Phys., vol. 94, pp. 4070-4078, Sept. 2003.
8. M. Buttiker, Y. Imry, R. Landauer, and S. Pinhas, "Generalized many-channel conductance formula with applications to small rings", Phys. Rev. B., vol. 31, pp. 6207-6215, 1985.
9. A. M. Cassell, Q. Ye, B. A. Cruden, J. Li, P. C. Sarrazin, H. T. Ng, J. Han, and M. Meyyappan, "Combinatorial chips for optimizing the growth and integration of carbon nanfibre based devices", Nanotechnology, vol. 15, pp. 9-15, 2004.
10. J. G. Wen et al., "Growth and characterization of aligned carbon nanotubes from patterned nickel nanodots and uniform thin films", J. Mater. Res., vol. 16, pp. 3246-3253, 2001.
11. V. I. Merkulov, M. A. Gullorn, D. H. Lowndes, and M. L. Simpson, "Shaping carbon nanostructures by controlling the synthesis process", Appl. Phys. Lett., vol. 79, pp. 1178-1180, 2001.
12. H. Cui, X. Yang, M. L. Simpson, D. H. Lowndes, and M. Varela, "Initial growth of vertically aligned carbon nanofibers", Appl. Phys. Lett, vol. 84, pp. 4077-4079, 2004.
13. International Technology Roadmap for Semiconductors (ITRS) 2004, http://public.itrs.net