Raman characterization of boron-doped {111} homoepitaxial diamond layers

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 572-576

  Mermoux, M ^a   Jomard, F ^b   Tavares C ^c   Omnes F ^c   Bustarret, E ^c  

^a LEPMI   (France)

^b Centre National de la Recherche Scientifique   (France)

^c LABORATOIRE DE CRISTALLOGRAPHIE   (France)

Author keywords

Diamond film; Homoepitaxy; p type doping; Vibrational properties characterization

Indexed keywords

DOPING (ADDITIVES); EPITAXIAL GROWTH; PHONONS; PHOSPHORUS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY;

HOMOEPITAXY; MICROWAVE PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION; P-TYPE DOPING; VIBRATIONAL PROPERTIES CHARACTERIZATION;

DIAMOND FILMS;

EID: 33746967641     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.11.035     Document Type: Article

References (15)

1. Kato H., Yamasaki S., and Okushi H. Appl. Phys. Lett. 86 (2005) 222111
2. Koizumi S., Watanabe K., Hasegawa M., and Kanda H. Diamond Relat. Mater. 11 (2002) 307
3. Tavares C., Tajani A., Baron C., Jomard F., Koizumi S., Gheeraert E., and Bustarret E. Diamond Relat. Mater. 14 (2005) 522
4. Mermoux M., Marcus B., Crisci A., Tajani A., Gheeraert E., and Bustarret E. J. Appl. Phys. 97 (2005) 43530
5. Sutcu L.F., Chu C.J., Thompson M.S., Hauge R.H., Margrave J.L., and D'Evelyn M.P. J. Appl. Phys. 71 (1992) 5930
6. Sakagushi I., Nishitani-Gamo M., Loh K.P., Hishita S., Haneda H., and Ando T. Appl. Phys. Lett. 73 (1998) 2675
7. Kasu M., Makimoto T., Ebert W., and Kohn E. Appl. Phys. Lett. 83 (2003) 3465
8. Wang Y., Li H., Zhangda Z., and Feng K. Jpn. J. Appl. Phys. 39 (2000) 2795
9. Mermoux M., Marcus B., Swain G.M., and Butler J.E. J. Phys. Chem., B 106 (2002) 10816
10. Honda K., Noda T., Yoshimura M., Nakagawa K., and Fujishima A. J. Phys. Chem., B 108 (2004) 19117
11. Bauer T., Screck M., Sternschulte H., and Stritzker B. Diamond Relat. Mater. 14 (2005) 266
12. Schreck M., Grunick C., Haug C., Brenn R., and Stritzker B. Diamond Relat. Mater. 11 (2002) 487
13. These spectra were obtained using an InVia Renishaw spectrometer, in its confocal mode.
14. Bustarret E., Gheeraert E., and Watanabe K. Phys. Status Solidi, A 199 (2003) 9
15. M. Mermoux, B. Marcus, A. Crisci, unpublished work.