Using discrete event simulation to analyze the impact of job priorities on cycle time in semiconductor manufacturing

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop

Volumn , Issue , 1996, Pages 151-155

  Fronckowiak, David ^a   Peikert, Andreas ^a   Nishinohara, Kazumi ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; COMPUTER SOFTWARE; INDUSTRIAL PLANTS; MATHEMATICAL MODELS; PROCESS ENGINEERING; SILICON WAFERS; SIMULATORS;

CYCLE TIME; DISCRETE EVENT SIMULATION; SEMICONDUCTOR MANUFACTURING LINE SIMULATOR; WAFER LOTS;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0030392962     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)