메뉴 건너뛰기




Volumn 126, Issue 8, 2006, Pages 801-806

Measurement of adhesion strength of DLC film prepared by utilizing plasma-based ion implantation

Author keywords

Adhesion strength; Diamond like carbon (DLC); Plasma based ion implantation; Pull test; Scratch test

Indexed keywords

ADHESION STRENGTH; DIAMOND-LIKE CARBON (DLC); PLASMA-BASED ION IMPLANTATION; PULL TEST; SCRATCH TEST;

EID: 33746871740     PISSN: 03854205     EISSN: 13475533     Source Type: Journal    
DOI: 10.1541/ieejfms.126.801     Document Type: Review
Times cited : (2)

References (21)
  • 1
    • 0010005593 scopus 로고
    • Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon
    • D. R. McKenzie, D. Muller, and B. A. Pailthoipe : "Compressive- Stress-Induced Formation of Thin-Film Tetrahedral Amorphous Carbon", Phys. Rev. Lett., Vol.67, pp.773-776 (1991)
    • (1991) Phys. Rev. Lett. , vol.67 , pp. 773-776
    • McKenzie, D.R.1    Muller, D.2    Pailthoipe, B.A.3
  • 4
    • 0042633781 scopus 로고
    • Plasma source ion-implantation technique for surface modification of materials
    • J. R. Conrad, J. L. Radtke, R. A. Dodd, F. J. Worzala, and N. C. Tran : "Plasma Source Ion-implantation Technique for Surface Modification of Materials"J. Appl. Phys., Vol.62, pp.4591-4596 (1987)
    • (1987) J. Appl. Phys. , vol.62 , pp. 4591-4596
    • Conrad, J.R.1    Radtke, J.L.2    Dodd, R.A.3    Worzala, F.J.4    Tran, N.C.5
  • 5
    • 0031224163 scopus 로고    scopus 로고
    • Adherent diamond-like carbon coatings on metals via plasma source Ion implantation
    • K. C. Walter, M. Nastasi, and C. Munson : "Adherent Diamond-like Carbon Coatings on Metals via Plasma Source Ion Implantation", Surf. Coat. Technol., Vol.93, pp.287-291 (1997)
    • (1997) Surf. Coat. Technol. , vol.93 , pp. 287-291
    • Walter, K.C.1    Nastasi, M.2    Munson, C.3
  • 6
    • 0036641212 scopus 로고    scopus 로고
    • A new PBIID processing system supplying RF and HV pulses through a single feed-through
    • Y. Nishimura, A. Chayahara, Y. Horino, and M. Yatsuzuka : "A New PBIID Processing System Supplying RF and HV Pulses through a Single Feed-through", Surf. Coat. Technol., Vol.156, pp.50-53 (2002)
    • (2002) Surf. Coat. Technol. , vol.156 , pp. 50-53
    • Nishimura, Y.1    Chayahara, A.2    Horino, Y.3    Yatsuzuka, M.4
  • 7
    • 0000194204 scopus 로고
    • The effect of heavy-ion bombardment on the properties of hard a-C:H (i-C) films
    • W. Zou, K. Schmidt, K. Reichelt, and B Stritzker : "The Effect of Heavy-Ion Bombardment on the Properties of Hard a-C:H (i-C) Films", J. Vac. Sci. Technol. A, Vol.6, pp.3103-3104 (1988)
    • (1988) J. Vac. Sci. Technol. A , vol.6 , pp. 3103-3104
    • Zou, W.1    Schmidt, K.2    Reichelt, K.3    Stritzker, B.4
  • 9
    • 0242292093 scopus 로고    scopus 로고
    • Control of stress and microstructure in cathodic arc deposited films
    • R. N. Tarrant, D. R. McKenzie, S. H. N. Lim, and D. G. McClloch : "Control of Stress and Microstructure in Cathodic Arc Deposited Films", IEEE Trans. Plasma Sci., Vol.31, pp.939-944 (2003)
    • (2003) IEEE Trans. Plasma Sci. , vol.31 , pp. 939-944
    • Tarrant, R.N.1    McKenzie, D.R.2    Lim, S.H.N.3    McClloch, D.G.4
  • 11
    • 17644369646 scopus 로고    scopus 로고
    • Measurement of residual stress in DLC films prepared by plasma-based ion implantation and deposition
    • Y. Oka, M. Kirinuki, Y Nishimura, K Azuma, E. Fujiwara, and M. Yatsuzuka : "Measurement of Residual Stress in DLC Films Prepared by Plasma-Based Ion Implantation and Deposition", Surf. Coal Technol., Vol.186, pp.141-145 (2004)
    • (2004) Surf. Coal Technol. , vol.186 , pp. 141-145
    • Oka, Y.1    Kirinuki, M.2    Nishimura, Y.3    Azuma, K.4    Fujiwara, E.5    Yatsuzuka, M.6
  • 15
    • 10244230955 scopus 로고    scopus 로고
    • Effects of Si content in DLC films on their friction and wear properties
    • M. Ikeyama, S. Nakao, Y. Miyagawa, and S. Miyagawa : "Effects of Si content in DLC films on their friction and wear properties". Surf. Coat. Technol., Vol.191, pp.38-42 (2005)
    • (2005) Surf. Coat. Technol. , vol.191 , pp. 38-42
    • Ikeyama, M.1    Nakao, S.2    Miyagawa, Y.3    Miyagawa, S.4
  • 16
    • 2442595874 scopus 로고    scopus 로고
    • The tribological properties of a gradient layer prepared by plasma-based ion implantation and deposition on 2024 aluminum alloy
    • J. X. Liao, L. F. Xia, M. R. Sun, W. M. Liu, T. Xu, and Q. J. Xue : "The tribological properties of a gradient layer prepared by plasma-based ion implantation and deposition on 2024 aluminum alloy", Surf. Coat. Technol., Vol.183, pp.157-164 (2004)
    • (2004) Surf. Coat. Technol. , vol.183 , pp. 157-164
    • Liao, J.X.1    Xia, L.F.2    Sun, M.R.3    Liu, W.M.4    Xu, T.5    Xue, Q.J.6
  • 17
    • 10244251682 scopus 로고    scopus 로고
    • Structures and tribological properties of diamond-like carbon films prepared by plasma-based ion implantation and deposition on Si
    • J. X. Liao, W. M. Liu, T. Xu, C. R. Yang, H. W. Chen, C. L. Fu, and W. J. Leng : "Structures and tribological properties of diamond-like carbon films prepared by plasma-based ion implantation and deposition on Si", Surf. Coat. Technol., Vol 91, pp. 90-95 (2005)
    • (2005) Surf. Coat. Technol. , vol.91 , pp. 90-95
    • Liao, J.X.1    Liu, W.M.2    Xu, T.3    Yang, C.R.4    Chen, H.W.5    Fu, C.L.6    Leng, W.J.7
  • 18
    • 0346119140 scopus 로고    scopus 로고
    • Tribological properties of diamond-like carbon films produced by different deposition techniques
    • M. Suzuki, T. Watanabe, A. Tanaka, and Y. Koga : "Tribological properties of diamond-like carbon films produced by different deposition techniques", Diamond & Related Materials, Vol.12, pp.2061-2065 (2003)
    • (2003) Diamond & Related Materials , vol.12 , pp. 2061-2065
    • Suzuki, M.1    Watanabe, T.2    Tanaka, A.3    Koga, Y.4
  • 19
    • 0038075107 scopus 로고    scopus 로고
    • Properties of diamond like carbon films by plasma based ion implantation and deposition method applying radio frequency wave and negative high voltage pulses through single feedthrough
    • H. Tojo, Y. Mokuno, A. Chayahara, S lura, H. Kasai, N. Toyama, T. Hidaka, S. Isogawa, M. hijino, and Y. Horino : "Properties of diamond like carbon films by plasma based ion implantation and deposition method applying radio frequency wave and negative high voltage pulses through single feedthrough", Nucl. Instr. Methods Phys. Res B, Vol.206, pp.717-720 (2003)
    • (2003) Nucl. Instr. Methods Phys. Res B , vol.206 , pp. 717-720
    • Tojo, H.1    Mokuno, Y.2    Chayahara, A.3    Lura, S.4    Kasai, H.5    Toyama, N.6    Hidaka, T.7    Isogawa, S.8    Hijino, M.9    Horino, Y.10
  • 20
    • 1842425390 scopus 로고    scopus 로고
    • DLC coating of a few microns in thickness on three-dimensional substrates
    • Y. Oka, Y. Nishimura, and M. Yatsuzuka : "DLC Coating of a Few Microns in Thickness on Three-dimensional Substrates", Vacuum, Vol.73, pp.541-547 (2004)
    • (2004) Vacuum , vol.73 , pp. 541-547
    • Oka, Y.1    Nishimura, Y.2    Yatsuzuka, M.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.