Three-dimensional morphology evolution of SiO 2 patterned films under MeV ion irradiation

Journal of Applied Physics

Volumn 100, Issue 2, 2006, Pages

  Otani, Kan ^a   Chen, Xi ^b   Hutchinson, John W ^a   Chervinsky, John F ^a   Aziz, Michael J ^a  

^a HARVARD UNIVERSITY   (United States)

^b Columbia University ^*  (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPIC DEFORMATION; ION IRRADIATION; SIO 2 PATTERNED FILMS;

ANISOTROPY; COMPUTER SIMULATION; DEFORMATION; FINITE ELEMENT METHOD; IRRADIATION; THIN FILMS;

SILICA;

EID: 33746820546     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2215269     Document Type: Article

References (33)

1. T. M. Mayer, E. Chason, and A. J. Howard, J. Appl. Phys. 76, 1633 (1994);
2. J. Erlebacher, M. Aziz, E. Chason, M. Sinclair, and J. Floro, Phys. Rev. Lett. 82, 2330 (1999);
3. S. Facsko, T. Dekorsy, C. Koerdt, C. Trappe, H. Kurz, A. Vogt, and H. L. Hartnagel, Science 285, 1551 (1999);
4. F. Frost, A. Schindler, and F. Bigl, Phys. Rev. Lett. 85, 4116 (2000);
5. S. Habenicht, Phys. Rev. B 63, 125419 (2001);
6. U. Valbusa, C. Boragno, and F. Buatier de Mongeot, J. Phys.: Condens. Matter 14, 8153 (2002);
7. D. P. Adams, M. J. Vasile, T. M. Mayer, and V. C. Hodges, J. Vac. Sci. Technol. B 21, 2334 (2003).
8. E. Snoeks, A. Polman, and C. A. Volkert, Appl. Phys. Lett. 65, 2487 (1994).
9. E. Snoeks, A. van Blaaderen, T. van Dillen, C. M. van Kats, K. Velikov, M. L. Brongersma, and A. Polman, Nucl. Instrum. Methods Phys. Res. B 178, 62 (2001).
10. J. Li, D. Stein, C. McMullan, D. Branton, M. J. Aziz, and J. Golovchenko, Nature (London) 412, 166 (2001);
11. D. Stein, J. Li, and J. A. Golovchenko, Phys. Rev. Lett. 89, 276106 (2002);
12. J. L. Li, M. Gershow, D. Stein, E. Brandin, and J. A. Golovchenko, Nat. Mater. 2, 611 (2003).
13. S. Roorda, T. van Dillen, A. Polman, C. Graf, A. van Blaaderen, and B. J. Kooi, Adv. Mater. (Weinheim, Ger.) 16, 235 (2004).
14. J. J. Penninkhof, A. Polman, L. A. Sweatlock, S. A. Maier, H. A. Atwater, A. M. Vredenberg, and B. J. Kooi, Appl. Phys. Lett. 83, 4137 (2003).
15. K. P. Velikov, T. van Dillen, A. Polman, and A. van Blaaderen, Appl. Phys. Lett. 81, 838 (2002).
16. S. Klaumunzer and G. Schumacher, Phys. Rev. Lett. 51, 1987 (1983);
17. A. Benyagoub, S. Loffler, M. Rammensee, S. Klaumunzer, and G. Saemannischenko, Nucl. Instrum. Methods Phys. Res. B 65, 228 (1992).
18. M. L. Brongersma, E. Snoeks, T. van Dillen, and A. Polman, J. Appl. Phys. 88, 59 (2000).
19. H. Trinkaus and A. I. Ryazanov, Phys. Rev. Lett. 74, 5072 (1995);
20. H. Trinkaus, Nucl. Instrum. Methods Phys. Res. B 146, 204 (1998);
21. T. van Dillen, A. Polman, P. R. Onck, and E. van der Giessen, Phys. Rev. B 71, 024103 (2005).
22. TGZ11 from Mikromasch, Inc.
23. http://rsb.info.nih.gov/ij/download.html
24. L. E. Malvem, Introduction to the Mechanics of a Continuous Medium (Prentice-Hall, Upper Saddle River, New Jersey, 1969).
25. E. Snoeks, T. Weber, A. Cacciato, and A. Polman, J. Appl. Phys. 78, 4723 (1995).
26. T. van Dillen, A. Polman, C. M. van Kats, and A. van Blaaderen, Appl. Phys. Lett. 83, 4315 (2003).
27. Hence the trace of D is zero.
28. ABAQUS, Abaqus 6.4 Theory Manual (ABAQUS, Inc., Pawtucket, RI, 2004).
29. 2, to the center of the spot. Matching an experimental profile from the center of the spot with the simulation, we find a value for A. This value of A is used to estimate the fluence for individual images in Fig. 2 by matching profiles, thereby providing the lateral ion distribution profile. This profile is integrated to find the resulting fluence, and then the entire profile is renormalized so that the integrated fluence matches the measured value.
30. J. F. Ziegler, J. P. Biersack, and U. Littmark, The Stopping and Range of Ions in Matter (Pergamon, New York, 1985).
31. G. C. Ball, T. K. Alexander, H. R. Andrews, W. G. Davies, and J. R. Forster, Nucl. Instrum. Methods Phys. Res. B 48, 125 (1990).
32. T. van Dillen, M. Y. S. Siem, and A. Polman, Appl. Phys. Lett. 85, 389 (2004).
33. A. Hedler, S. Klaumunzer, and W. Wesch, Phys. Rev. B 72, 054108 (2005).