Stress map for ion irradiation: Depth-resolved dynamic competition between radiation-induced viscoelastic phenomena in SiO2

Applied Physics Letters

Volumn 85, Issue 3, 2004, Pages 389-391

  Van Dillen, T ^a   Siem, M Y S ^a   Polman, A ^a  

^a FOM INSTITUTE AMOLF   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; COMPRESSIVE STRESS; COMPUTER SIMULATION; DENSIFICATION; DIFFERENTIAL EQUATIONS; MONTE CARLO METHODS; NEWTONIAN FLOW; SILICA; STRAIN; TENSILE STRESS; THERMOOXIDATION; THIN FILMS; VISCOELASTICITY; VISCOUS FLOW;

ANISOTROPIC STRAIN GENERATION; RADIATION INDUCED VISCOSITY; STRESS MAPS; STRUCTURAL TRANSFORMATION;

ION BOMBARDMENT;

EID: 4043139284     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1773927     Document Type: Article

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