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Volumn 24, Issue 4, 2006, Pages 2119-2123

Growth of a stacked silicon nitride/silicon oxide dielectric on Si (100)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; DISSOCIATION; MICROELECTRONICS; MOS DEVICES; OXIDATION; SILICA; SILICON NITRIDE;

MICROPROCESSOR DEVICES; MICROWAVE DISSOCIATION; NITRIDATION; SILICON OXIDE;

DIELECTRIC MATERIALS;

EID: 33746569085 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2220574 Document Type: Article

Times cited : (42)

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