SCOPUS 정보 검색 플랫폼

Volumn 24, Issue 4, 2006, Pages 1941-1946

Three-dimensional nanochannels formed by fast etching of polymer

Author keywords

[No Author keywords available]

Indexed keywords

DNA ANALYSIS; OXIDE DEPOSITION; POLYMER NANOSTRUCTURES; THREE-DIMENSIONAL NANOCHANNELS;

BIOMEDICAL ENGINEERING; DNA; DRY ETCHING; NANOSTRUCTURED MATERIALS; OXYGEN; PHOTOLITHOGRAPHY; PHOTORESISTS; SILICON; SUBSTRATES;

POLYMERS;

EID: 33746506148 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2221319 Document Type: Article

Times cited : (5)

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