Enhanced transport by acoustic streaming in deep trench-like cavities

Journal of the Electrochemical Society

Volumn 149, Issue 4, 2002, Pages

  Nilson, R H ^a   Griffiths, S K ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION; DISSOLUTION; ELECTRODEPOSITION; MATHEMATICAL MODELS; MICROELECTRONIC PROCESSING; NAVIER STOKES EQUATIONS; PHOTORESISTS; POLYMETHYL METHACRYLATES; RATE CONSTANTS; SUBSTRATES; X RAYS;

ACOUSTIC REYNOLDS STRESS; CHEMICAL DISSOLUTION RATE; SEMICONDUCTOR MICRODEVICE FABRICATION; SLIP VELOCITY;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0036530979     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1459716     Document Type: Article

References (16)

1. Acoustic streaming