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Volumn 112, Issue 3 I, 2002, Pages 1196-1201
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A novel cavitation probe design and some preliminary measurements of its application to megasonic cleaning
a b |
Author keywords
[No Author keywords available]
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Indexed keywords
ACOUSTICS;
CHEMICAL REACTIONS;
SONOLUMINESCENCE;
MEGASONIC CLEANING;
CAVITATION;
ACOUSTICS;
ACOUSTICS;
ARTICLE;
LUMINESCENCE;
PHOTON;
PRIORITY JOURNAL;
SEMICONDUCTOR;
SPIKE;
TRANSDUCER;
ULTRASOUND;
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EID: 0036711996
PISSN: 00014966
EISSN: None
Source Type: Journal
DOI: 10.1121/1.1498856 Document Type: Article |
Times cited : (34)
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References (16)
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