Vibrating and resonant MEMS sensors

Proceeding of the 2004 the Eleventh World Congress in Mechanism and Machine Science

Volumn , Issue , 2004, Pages 33-44

  Burdess, J S ^a   Harris, A J ^a   Gallacher, B J ^a   Hedley, J ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

MEMS; Resonators; Sensors; Testing

Indexed keywords

ACCELEROMETERS; FOURIER TRANSFORMS; GYROSCOPES; MAGNETIC FIELD MEASUREMENT; MECHANICAL VARIABLES MEASUREMENT;

ELECTRODE EXCITATION; PIEZOELECTRIC EXCITATION; SILICON VIBRATING ACCELEROMETER; VIBRATING STRUCTURES;

SENSORS;

EID: 4944232025     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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