Magnetic direct generation of acoustic resonances in silicon membranes

Measurement Science and Technology

Volumn 17, Issue 4, 2006, Pages 719-726

  Lucklum, Frieder ^a,b,c   Hauptmann, Peter ^a   De Rooij, Nico F ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^c JOHANNES KEPLER UNIVERSITY LINZ   (Austria)

Author keywords

Acoustic sensor; EMAT; High Q silicon resonator; Magnetic direct generation; Planar spiral coil; QCM; Sauerbrey mass loading

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC WAVES; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MEMBRANES; Q FACTOR MEASUREMENT; QUARTZ; RADIO FREQUENCY AMPLIFIERS; SEMICONDUCTING SILICON;

ACOUSTIC SENSORS; HIGH-Q SILICON RESONATOR; MAGNETIC DIRECT GENERATION; PLANAR SPIRAL COILS; QCM; SAUERBREY MASS LOADING;

MAGNETIC RESONANCE;

ACOUSTIC RESONATORS; ACOUSTIC WAVES; COMPUTER SIMULATION; FINITE ELEMENT METHOD; MAGNETIC FIELDS; MAGNETIC RESONANCE; MEMBRANES; Q FACTOR MEASUREMENT; QUARTZ; RADIO FREQUENCY AMPLIFIERS; SEMICONDUCTING SILICON;

EID: 33645224388     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/17/4/017     Document Type: Article

References (18)

1. Grate J W, Martin S J and White R M 1993 Acoustic wave microsensors (Part 1) Anal. Chem. 65 940A-8A
2. Grate J W, Martin S J and White R M 1993 Acoustic wave microsensors (Part 2) Anal. Chem. 65 987A-96A
3. Park J, Groves W A and Zellers E T 1999 Vapor recognition with small arrays of polymer-coated microsensors: a comprehensive analysis Anal. Chem. 71 3877-86
4. Wegener J, Janshoff A and Galla H J 1999 Cell adhesion monitoring using a quartz crystal microbalance: comparative analysis of different mammalian cell lines Eur. Biophys. J. 28 26-37
5. Kaspar M, Stadler H, Wei T and Ziegler C 2000 Thickness shear mode resonators ('mass-sensitive devices') in bioanalysis Fresenius' J. Anal. Chem. 366 602-10
6. Lucklum R, Behling C, Cernosek R W and Martin S J 1997 Determination of complex shear modulus with thickness shear mode resonators J. Phys. D: Appl. Phys. 30 346-56
7. Behling C, Lucklum R and Hauptmann P 1998 Response of quartz-crystal resonators to gas and liquid analyte exposure Sensors Actuators A 68 388-98
8. Krautkrämer J and Krautkrämer H 1961 Werkstoffprüfung mit Ultraschall (Berlin: Springer) chapter 8
9. Stevenson A C and Lowe C R 1999 Magnetic-acoustic- resonator sensors (MARS): a new sensing methodology Sensors Actuators A 72 32-7
10. Thompson M, Ballantyne S M, Stevenson A C and Lowe C R 2003 Electromagnetic excitation of high frequency acoustic waves and detection in the liquid phase Analyst 128 1048-55
11. Stevenson A C, Araya-Kleinsteuber B, Sethi R S, Metha H M and Lowe C R 2005 Planar coil excitation of multifrequency shear wave transducers Biosens. Bioelectron. 20 1298-304
12. Darinskii A N Shear Mode Generation personal communication, unpublished
13. Quinn J J 1967 Electromagnetic generation of acoustic waves and the surface impedance of metals Phys. Lett. A 25 522-3
14. Martin S J, Granstaff V E and Frye G C 1991 Characterization of a quartz crystal microbalance with simultaneous mass and liquid loading Anal. Chem. 63 2272-81
15. Johannsmann D, Mathauer K, Wegner G and Knoll W 1992 Viscoelastic properties of thin films probed with a quartz-crystal resonator Phys. Rev. B 46 7808-15
16. Lucklum R and Hauptmann P 2003 Transduction mechanism of acoustic-wave based chemical and biochemical sensors Meas. Sci. Technol. 14 1854-64
17. Sauerbrey G Z 1959 Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung Z. Phys. 155 206-22
18. Hempel U, Schlatt-Masuth B, Lucklum R and Hauptmann P 2004 Nanoparticles with QCR sensors Proc. IEEE Int. Freq. Control. Symp. pp 229-34