Recent experimental and theoretical advances in microdrilling of polymers with ultraviolet laser beams;Récents progrès expérimentaux et théoriques en micro-perçage des polymères par faisceaux laser ultraviolets

Mecanique et Industries

Volumn 7, Issue 2, 2006, Pages 111-122

  Lazare, Sylvain ^a   Tokarev, Vladimir ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

Cutting; Divergence; Drilling; Laser; Materials; Mechanisms; Model; Polymer; Processing; Profile

Indexed keywords

DIVERGENCE; DRILLING PROCESS; EXPERIMENTAL CONDITIONS; HIGH ASPECT RATIO; MICROSCOPIC LEVELS; PROFILE; REGULAR CONFIGURATION; THEORETICAL LIMITS;

ASPECT RATIO; CUTTING; DEFORMATION; DRILLING; LASERS; MATERIALS; MECHANISMS; MODELS; POLYETHYLENE TEREPHTHALATES; POLYMERS; PROCESSING; ULTRAVIOLET LASERS;

LASER MATERIALS PROCESSING;

EID: 33746290712     PISSN: 12962139     EISSN: 17652960     Source Type: Journal    
DOI: 10.1051/meca:2006025     Document Type: Article

References (32)

1. B. Braren, R. Srinivasan, Optical and photochemical factors which influence etching of polymers by ablative photodecomposition, J. Vac. Sci. B 3 (1985) 913-917
2. R.W. Olson, W.C. Swope, Laser drilling with focused Gaussian beams, J. Appl. Phys. 72 (1992) 3686-3696
3. M. Olfert, W.W. Duley, Holographic interferometry of isotherms during laser drilling of fused quartz, J. Phys. D: Appl. Phys. 29 (1996) 1140-1145
4. J.A. Clarke, T.S. Givens, J.T. Williamson, Laser drilling of diesel fuel injector nozzles, Lambda Highlights 62 (2003) 4-5
5. F. Dausinger, H. Hügel, V. Konov, Micro-machining with ultrashort laser pulses : from basic understanding to technical applications, Proc. SPIE 5147 (2003) 106
6. G. Körner, R. Mayerhofer, M. Hartmann, H.W. Bergmann, Physical and material aspects in using visible laser pulses of nanosecond duration for ablation, Appl. Phys. A 63 (1996) 123
7. C. Paterson, A.S. Holmes, R.W. Smith, Excimer laser ablation of microstructures : A numerical model, J. Appl. Phys. 86 (1999) 6538
8. A. Luft, U. Franz, A. Emsermann, J. Kaspar, A study of thermal and mechanical effects on materials induced by pulsed laser drilling, Appl. Phys. A 63 (1996) 93
9. Y. Chen, H.Y. Zheng, K.S. Wong, S.C. Tam, Excimer laser drilling of polymers, Proc. SPIE 3184 (1997) 202
10. N. Rykalin, A. Uglov, A. Kokora, Laser Machining and Welding (MIR, Moscou 1978)
11. C. Lehane, H.S. Kwok, Enhanced drilling using a dual-pulse Nd :YAG laser, Appl. Phys. A 73 (2001) 45
12. T. Otani, L. Herbst, M. Heglin, S.V. Govorkov, A.O. Wiessner, Microdrilling and micromachining with diodepumped solid-state lasers, Appl. Phys. A 79 (2004) 1335
13. S. Lazare, J. Lopez, F. Weisbuch, High-aspect-ratio microdrilling in polymeric materials with intense KrF laser radiation, Appl. Phys. A 69 (1999) SI
14. J. Lopez, S. Lazare, Microperçage des polymères par laser à excimère, J. Phys. IV France 9 (1999) 153
15. J. Lopez, S. Lazare, F. Weisbuch, High aspect ratio microdrilling in polymeric materials with intense KrF laser radiation, Proc. SPIE 3822 (1999) 77
16. V.N. Tokarev, J. Lopez, S. Lazare, Modelling high aspect ratio microdrilling of polymers with UV laser ablation, Appl. Surf. Sci. 168 (2000) 75
17. V.N. Tokarev, J. Lopez, S. Lazare, F. Weisbuch, High aspect ratio microdrilling of polymers with UV laser ablation: experiment with analytical model, Appl. Phys. A 76 (2003) 385
18. A.E. Siegman, Lasers, 6th ed., University Science Book, 1986
19. S. Lazare, V. Tokarev, Recent experimental and theoretical advances in microdrilling of polymers with ultraviolet laser beams, conférence invitée présentée au "Fifth International Symposium on Laser Precision Microfabrication, LPM04" (Nara, Japon, mai 2004), et publié en anglais dans I. Miyamoto, H. Helvajian, K. Itoh, K.F. Kobayashi, A. Ostendorf, K. Sugioka, (ed.), Proceedings of SPIE 5662 (2004) 221-231
20. F. Weisbuch, S. Lazare, F.N. Goodall, D. Débarre, Submicron resolution ablation with a KrF excimer laser beam patterned with a projection lens, Appl. Phys. A 69 (1999) 413
21. S. Lazare, P. Benet, Surface amorphization of Mylar films with the excimer laser radiation above and below ablation threshold : ellipsometric measurements, J. Appl. Phys. 74 (1993) 4953
22. F. Weisbuch, V.N. Tokarev, S. Lazare, D. Débarre, Ablation with a single micropatterned KrF laser pulse : quantitative evidence of transient liquid microflow driven by the plume pressure gradient at the surface of polyesters, Appl. Phys. A 76 (2003) 613
23. F. Weisbuch, V.N. Tokarev, S. Lazare, C. Belin, J.L. Bruneel, Millimeter long nanofibers of PMMA spun at super high speed by ablation with one pulse of the KrF excimer laser, Appl. Phys. A 75 (2002) 677
24. F. Weisbluch, V.N. Tokarev, S. Lazare, C. Belin, J.L. Bruneel, Millimeter long PMMA nanofibers - A new form of material removal in laser ablation, Thin Solid Films 453-454 (2004) 394
25. J. Lopez, Ablation profonde et microperçage de matériaux polymères par laser à exciméres, Thése de doctorat de l'Université de Bordeaux 1, 1997
26. E.G. Gamaly, A.V. Rode, B. Luther-Davis, Ultrafast ablation with high-pulse-rate lasers. Part I : Theoretical considerations, J. Appl. Phys. 85 (1999) 4213
27. M.R. H. Knowles, Micro-ablation with high power pulsed copper vapor laser, Opt. Expr. 7 (2000) 50
28. G. Kamlage, T. Bauer, A. Ostendorf, B.N. Chichkov, Deep drilling of metals by femtosecond laser pulses, Appl. Phys. A 77 (2003) 307
29. S. Juodkazis, H. Okuno, N. Kujime, S. Matsuo, H. Misawa, Hole drilling in stainless steel and silicon by femtosecond pulses at low pressure, Appl. Phys. A 79 (2004) 1555
30. L. Shah, J. Tawney, M. Richardson, K. Richardson, Femtosecond laser deep hole drilling of silicate glasses in air, Appl. Surf. Sci. 183 (2001) 151
31. H. Varel, D. Ashkenasi, A. Rosenfeld, M. Wähmer, E.E.B. Campbell, Micromachining of quartz with ultrashort laser pulses, Appl. Phys. A 65 (1997) 367
32. Y. Zhang, R.M. Lowe, E. Harvey, P. Hannaford, A. Endo, High aspect ratio micromachining of polymers with ultrafast laser, Appl. Surf. Sci. 186 (2002) 345