Excimer laser drilling of polymers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3184, Issue , 1997, Pages 202-210

  Chen, Y H ^a   Zheng, H Y ^a   Wong, K S ^a   Tam, S C ^b  

^a SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^b NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Excimer laser; Laser drilling; Laser etching; Laser micro machining; Polymers

Indexed keywords

CARBON DIOXIDE; CERAMIC TOOLS; DRILLING; ETCHING; EXCIMER LASERS; GAS LASERS; LASER BEAMS; LASER PULSES; MACHINING; MECHANISMS; METAL RECOVERY; MICROELECTRONIC PROCESSING; MICROELECTRONICS; MICROMACHINING; PHOTORESISTS; POLYETHYLENE TEREPHTHALATES; POLYIMIDES; POLYMERS; PULSED LASER APPLICATIONS; THERMOPLASTICS; THREE DIMENSIONAL;

BEAM CHARACTERISTICS; BEAM ENERGIES; CERAMIC SHEETS; DRILLED HOLES; DRILLING TECHNOLOGIES; ELECTRONIC PACKAGES; ETCH RATES; EXCIMER; FLUENCE; FLUENCE RANGES; FORMING TECHNOLOGIES; HOLE QUALITIES; LASER DRILLING; LASER ETCHING; LASER WAVELENGTHS; MATERIAL REMOVALS; ND: YAG; NON-METALS; PUNCH TOOLS; TURN-AROUND; TWO TYPES; VERTICAL INTERCONNECTIONS; VIA HOLES; WIRING NETWORKS;

LASERS;

EID: 57649138032     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.280575     Document Type: Conference Paper

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