Modelling of high-aspect ratio microdrilling of polymers with UV laser ablation

Applied Surface Science

Volumn 168, Issue 1-4, 2000, Pages 75-78

  Tokarev, V N ^a   Lopez, J ^a   Lazare, S ^a  

^a Ecl Polytech Universites B   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DRILLING; EXCIMER LASERS; MATHEMATICAL MODELS; OPTIMIZATION; POLYMERS;

LASER DRILLING; MICRODRILLING;

LASER ABLATION;

EID: 0034504027     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00594-8     Document Type: Article

References (9)

1. Braren B., Srinivasan R. J. Vac. Sci. Technol. B. 3:1985;913.
2. Lambda Highlights 7 (1987) 4.
3. S. Lazare, D. Drilhole, J. Lopez, F. Weisbuch, in: Le vide: science, technique et applications, Vol. 54, no. 287 (Revue de la Société Française du Vide: French Vacuum Soc.), 1998, pp. 265-283.
4. S. Lazare, J. Lopez, F. Weisbuch, Appl. Phys. A 69 (Suppl.) (1999) 1.
5. Lopez J., Lazare S. J. Phys. IV France. 9:1999;153.
6. Paterson C., Holmes A.S., Smith R.W. J. Appl. Phys. 86:1999;6538.
7. Tokarev V.N., Wilson J.I.B., Jubber M.G., John P., Milne D.K. Diamond Relat. Mater. 4:1995;169.
8. Tokarev V.N., Kaplan A.F.H. Lasers Eng. 7:1998;295.
9. V.N. Tokarev, J. Lopez, S. Lazare, in preparation.