High aspect ratio microdrilling in polymeric materials with intense KrF laser radiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3822, Issue , 1999, Pages 77-82

  Lopez, John ^a   Lazare, Sylvain ^a   Weisbuch, Francois ^a  

^a UNIVERSITÉ DE BORDEAUX   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DRILLING; EXCIMER LASERS; MICROMACHINING; POLYMERS;

MICRODRILLING;

LASER ABLATION;

EID: 0033357474     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)