Nanomechanical characterization of amorphous hydrogenated carbon thin films

Applied Surface Science

Volumn 252, Issue 18, 2006, Pages 6243-6248

  Fang, Te Hua ^a   Chang, Win Jin ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b KUN SHAN UNIVERSITY   (Taiwan)

Author keywords

AFM; Amorphous hydrogenated carbon films; ECR MPCVD; Nanoindentation; Raman spectra

Indexed keywords

AMORPHOUS FILMS; ATOMIC FORCE MICROSCOPY; CARBON; CHEMICAL VAPOR DEPOSITION; ELECTRON CYCLOTRON RESONANCE; HYDROGENATION;

AMORPHOUS HYDROGENATED CARBON FILMS; ECR-MPCVD; NANOINDENTATION;

THIN FILMS;

EID: 33746253264     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2005.08.063     Document Type: Article

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